On-line re-optimization is only sensible if we have reliable on-line characterization results.
A reliable on-line characterization is much more computationally extensive than the on-line re-optimization, especially when the number of deposited layers is high. OptiReOpt provides extremely efficient optimization routines allowing to prevent interruptions of a deposition process caused by the delays of characterization results.
| Main features of on-line re-optimization
Combination of broadband optical monitoring with OptiReOpt on-line characterization and subsequent on-line re-optimization has proven to be an efficient
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