Surface Roughness

Refractive index profile with surface overlayer

Experimental ellipsometric angle Psi.

 Experimental ellipsometric angle Delta

Intermediate fitting of experimental angle Psi by model angle Psi after application of homogeneous thin film model.

Intermediate fitting of experimental angle Delta by model angle Psi after application of homogeneous thin film model. Deviations between experimental and model angle Delta indicate presence of surface inhomogeneity (overlayer).

Final fitting of experimental angle Psi by model angle Psi after application of more sophisticated model taking into account surface inhomogeneity (overlayer).

Final fitting of experimental angle Delta by model angle Psi after application of more sophisticated model taking into account surface inhomogeneity (overlayer).

Details in our publications:

1. A. V. Tikhonravov, M. K. Trubetskov, A. A. Tikhonravov, and A. Duparre’, “Effects of interface roughness on the spectral properties of thin films and multilayers ,” Appl. Opt. 42, 5140-5148 (2003).
2. D. Ristau, S. Gunster, S. Bosch, A. Duparre, E. Masetti, J. Ferre-Borrull, G. Kiriakidis, F. Peiro, E. Quesnel, and A. Tikhonravov, “Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation ,” Appl. Opt. 41, 3196-3204 (2002).
3. A. Tikhonravov, M. K. Trubetskov, A. V. Krasilnikova, E. Masetti, A. Duparre, E. Quesnel, and D. Ristau, “Invesitigation of the surface micro-roughness of fluoride films by spectrometric ellipsometry,” Thin Solid Films 397, 229-237 (2001).
4. A. V. Tikhonravov, M. K. Trubetskov, E. Masetti, A. V. Krasilnikova, I. V. Kochikov, Sensitivity of the ellipsometric angles psi and delta to the surface inhomogeneity, Proc. SPIE. 3738, Advances in Optical Interference Coatings 173 (1999)