Indices Correction Model

• Constant drifts (offsets) – the same for all layers of the chosen material
• Linear drift assuming linear dependency of the index drift on the layer number
• Exponential drift assuming the following dependency on the layer number j:

\[ \delta n_j=C\exp(-\alpha j)\]

Exponential type of drifts usually provides large deviations at the beginning of deposition that are rapidly decreasing with the layer number.

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